Wisconsin Discovery Portal

Researcher: Roxann Engelstad

[ printable ]
Areas of Expertise
  • Energy efficiency
  • Biomechanics
  • Robotics
  • Manufacturing
  • Controls
  • Engines
  • Solar energy
  • Power electronics
  • Design
  • Optimization
  • Structural dynamics
  • Vibrations
  • Solid mechanics
  • Mechanical design
  • Nonlinear vibration and stability analysis of piping components due to flow-induced excitations
  • Computer modeling and simulation
Web Site Roxann Engelstad's Department of Mechanical Engineering Website
Curriculum Vitae (CV)
Issued Patent(s)
  • 7,418,353 - Determining film stress from substrate shape using finite element procedures, issued August 2008.
USPTO Published Applications
  • 20060123919 - Determining film stress from substrate shape using finite element procedures, published June 2006.
Recent Publication(s)
  • Determination of local electrostatic forces for EUVL mask chucks. Engelstad R. Microelectronic Engineering. 2010 Aug;87(5-8):1287-1289. doi: 10.1016/j.mee.2009.10.010.

  • Experimental determination of image placement accuracy in extreme ultraviolet lithography. Raghunathan S, Wood O, Vukkadala P, Engelstad R, J Hartley. J. Vac. Sci. Technol. B. 2009 Nov;27(6):2905-2910. doi: 10.1116/1.3264659.

  • Overview of IP error compensation techniques for EUVL. Vukkadala P, Patil D, Engelstad R. Proc. SPIE 7545, 26th European Mask and Lithography Conference. 2010 May 15;7545. doi: 10.1117/12.863556.
Recent Artistic Works
Collaboration
  • Center for NanoTechnology
  • Computational Mechanics Center
  • Engine Research Center
  • Fusion Technology Institute
  • Manufacturing Systems Engineering Program
Research Tools
Research Facilities
E-mail Address [email protected]
Phone Number 608-262-5745
Current University UW–Madison
Department Mechanical Engineering
Title Professor
Other Appointments
Address Line 1 3065B Mechanical Engineering Building
Address Line 2 1513 University Avenue
City Madison
State WI
Zip Code 53706
Bachelor's Degree B.S., UW–Madison, Mechanical Engineering, 1977
Master's Degree M.S., UW–Madison, Mechanical Engineering, 1979
PhD Ph.D., UW–Madison, Mechanical Engineering, 1988
Other Degrees
Technologies Available for Licensing Determining Film Stress from Substrate Shape Using Finite Element Procedures